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> ж. Russian Microelectronics
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VAL
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ж. Russian Microelectronics
Источники:
- https://www.springer.com/engineering/electr...s/journal/11180
- http://sciencejournals.ru/journal/mikelek/

Russian Microelectronics Editor-in-Chief: Gennady Y. Krasnikov

QUOTE
Official Journal of the Russian Academy of Sciences
Examines the physical and technological aspects of microelectronics and nanoelectronics as well as select VLSI and ULSI circuit-technical aspects
Presents new trends in submicron optical, x-ray, electron, and ion beam lithography technology; dry processing techniques; etching; doping; and deposition and planarization technology 


QUOTE
Russian Microelectronics  covers physical, technological, and some VLSI and ULSI circuit-technical aspects of microelectronics and nanoelectronics; it informs the reader of new trends in submicron optical, x-ray, electron, and ion-beam lithography technology; dry processing techniques, etching, doping; and deposition and planarization technology. Significant space is devoted to problems arising in the application of proton, electron, and ion beams, plasma, etc. Consideration is given to new equipment, including cluster tools and control in situ and submicron CMOS, bipolar, and BICMOS technologies. The journal publishes papers addressing problems of molecular beam epitaxy and related processes; heterojunction devices and integrated circuits; the technology and devices of nanoelectronics; and the fabrication of nanometer scale devices, including new device structures, quantum-effect devices, and superconducting devices. The reader will find papers containing news of the diagnostics of surfaces and microelectronic structures, the modeling of technological processes and devices in micro- and nanoelectronics, including nanotransistors, and solid state qubits.


Abstracted/Indexed in:
SCOPUS, INSPEC,
Chemical Abstracts Service (CAS),
Google Scholar,
Current Contents Collections / Electronics & Telecommunications Collection, EBSCO Academic Search, EBSCO Applied Science & Technology Source, EBSCO Computers & Applied Sciences Complete, EBSCO Discovery Service, EBSCO Engineering Source, EBSCO STM Source, EBSCO TOC Premier, EI Compendex, Gale, Gale Academic OneFile, Gale InfoTrac, OCLC WorldCat Discovery Service, ProQuest Materials Science & Engineering Database, ProQuest SciTech Premium Collection, ProQuest Technology Collection, ProQuest-ExLibris Primo, ProQuest-ExLibris Summon


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VAL
Дата 8.04.2019 11:05
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Сообщений: 38059
Пользователь №: 1
Регистрация: 6.03.2004
QUOTE
Russian Microelectronics
Editorial Office

Mikroelektronika
Institute of Physics and Technology
Nakhimovskii pr. 36, Moscow, 117218 Russia

Phone: +7 (499) 125-3826
Fax: +7 (499) 129-3141
ponomareval@mail.ru


Требования для авторов: http://sciencejournals.ru/journals/mikelek/guid.pdf


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